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High-Speed Scanning Interferometer Using CMOS Image Sensor and FPGA Based on Multifrequency Phase-Tracking DetectionA sub-aperture stitching optical interferometer can provide a cost-effective solution for an in situ metrology tool for large optics; however, the currently available technologies are not suitable for high-speed and real-time continuous scan. NanoWave s SPPE (Scanning Probe Position Encoder) has been proven to exhibit excellent stability and sub-nanometer precision with a large dynamic range. This same technology can transform many optical interferometers into real-time subnanometer precision tools with only minor modification. The proposed field-programmable gate array (FPGA) signal processing concept, coupled with a new-generation, high-speed, mega-pixel CMOS (complementary metal-oxide semiconductor) image sensor, enables high speed (>1 m/s) and real-time continuous surface profiling that is insensitive to variation of pixel sensitivity and/or optical transmission/reflection. This is especially useful for large optics surface profiling.
Document ID
20120011914
Acquisition Source
Goddard Space Flight Center
Document Type
Other - NASA Tech Brief
External Source(s)
http://www.techbriefs.com/component/content/article/14056
Authors
Ohara, Tetsuo (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Date Acquired
August 26, 2013
Publication Date
July 1, 2012
Publication Information
Publication: NASA Tech Briefs, July 2012
Subject Category
Man/System Technology And Life Support
Report/Patent Number
GSC-15942-1
Distribution Limits
Public
Copyright
Public Use Permitted.

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IDRelationTitle20120011880Collected WorksNASA Tech Briefs, July 2012
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