Blaffart, Frédéric
[UCL]
Van Wonterghem, Frédéric
[UCL]
Santoro, Ronny
[UCL]
Proost, Joris
[UCL]
This study investigates the mechanism responsible for the electrochemical oscillations during silicon galvanostatic anodizing. Two oscillatory regimes of anodic silica formation in dilute fluoride electrolyte are monitored by combined in-situ curvature measurement and ellipsometry. At lower applied current density, a dense silica film is formed and the oscillations features are similar to those observed in fluoride-free electrolytes. At higher applied current density, a porous silica film is formed and the oscillations progressively reappear after a transition regime without oscillations. The disappearance and the reappearance of the oscillations are associated to variations of the degree of synchronization between the self-oscillating domains. In addition, the similarities between the oscillatory regimes and the persistence of sustained oscillations during the formation of thicker silica indicate that all oscillations arise from a same mechanism that survives the oxide accumulation at the silicon surface.
Bibliographic reference |
Blaffart, Frédéric ; Van Wonterghem, Frédéric ; Santoro, Ronny ; Proost, Joris. In-situ monitoring of electrochemical oscillations during the transition between dense and porous anodic silica formation. In: Journal of the Electrochemical Society, Vol. 161, no. 14, p. H874-H879 (2014) |
Permanent URL |
http://hdl.handle.net/2078.1/145331 |