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A review of fully-depleted SOI CMOS technology for microsystems

Bibliographic reference Demeûs, Laurent ; Delatte, Pierre ; Dessard, Vincent ; Adriaensen, Stéphane ; Renaux, Christian ; et. al. A review of fully-depleted SOI CMOS technology for microsystems.3rd International Conference on Micro Materials (Berlin (Germany), du 17/04/2000 au 19/04/2000). In: Proceedings of the 3rd International Conference on Micro Materials, 2000, p.69-72
Permanent URL http://hdl.handle.net/2078.1/95016