Evaluation of the elastic properties of thin films by finite element method

This work addresses the implementation of a 3D finite element model (FEM) allowing the evaluation of the elastic properties of metallic thin films deposited on a substrate by magnetron sputtering. In particular, the Young's modulus and the stress-strain relation in compression of Cu, Zr, amorphous CuZr and multilayered Cu/Zr films are studied. First, the governing equations of elasticity augmented by surface stress and surface stiffness theories are recalled in their analytical form, then the corresponding finite element formulation is derived. The transport of sputtered particles through the gas phase flux during sputtering is performed with the binary collision Monte Carlo program Simtra. The simulation of deposition, diffusion, nucleation and growth of the films is performed by the kinetic Monte Carlo code Nascam. Finally, the Young's modulus obtained by the FEM simulation is compared to experimental results from the literature.