Power-efficient silicon nitride thermo-optic phase shifters for visible light

Yong, Zheng; Chen, Hong; Luo, Xianshu; Govdeli, Alperen; Chua, Hongyao; Azadeh, Saeed S.; Stalmashonak, Andrei; Lo, Guo-Qiang; Poon, Joyce K. S.; Sacher, Wesley D.

doi:10.1364/OE.448614

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Power-efficient silicon nitride thermo-optic phase shifters for visible light

MPS-Authors

Yong, Zheng
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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Chen, Hong
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons269781

Govdeli, Alperen
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons258016

Azadeh, Saeed S.
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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Stalmashonak, Andrei
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons257612

Poon, Joyce K. S.
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons258003

Sacher, Wesley D.
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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https://doi.org/10.1364/OE.448614
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Citation

Yong, Z., Chen, H., Luo, X., Govdeli, A., Chua, H., Azadeh, S. S., et al. (2022). Power-efficient silicon nitride thermo-optic phase shifters for visible light. Optics Express, 30(5), 7225-7237. doi:10.1364/OE.448614.

Cite as: https://hdl.handle.net/21.11116/0000-000A-0165-3

Abstract

We demonstrate power-efficient, thermo-optic, silicon nitride waveguide phase shifters for blue, green, and yellow wavelengths. The phase shifters operated with low power consumption due to a suspended structure and multi-pass waveguide design. The devices were fabricated on 200-mm silicon wafers using deep ultraviolet lithography as part of an active visible-light integrated photonics platform. The measured power consumption to achieve a π phase shift (averaged over multiple devices) was 0.78, 0.93, 1.09, and 1.20 mW at wavelengths of 445, 488, 532, and 561 nm, respectively. The phase shifters were integrated into Mach-Zehnder interferometer switches, and 10 − 90% rise(fall) times of about 570(590) μs were measured.