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Hokkaido University Collection of Scholarly and Academic Papers >
Graduate School of Engineering / Faculty of Engineering >
北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University >
No.112 >
エリプソ・インタフェロメトリにおける多重反射と回折の影響
| Title: | エリプソ・インタフェロメトリにおける多重反射と回折の影響 |
| Other Titles: | Effects of Multiple Reflection and Diffraction on Lateral Resolution of Ellipso-Interferometry |
| Authors: | 三島, 瑛人1 Browse this author | | 佐藤, 邦宏2 Browse this author | | 伊藤, 泰宏3 Browse this author | | 桜庭, 一郎4 Browse this author |
| Authors(alt): | Mishima, Teruhito1 | | Satoh, Kunihiro2 | | Itoh, Yasuhiro3 | | Sakuraba, Ichiro4 |
| Issue Date: | 31-Jan-1983 |
| Publisher: | 北海道大学 |
| Journal Title: | 北海道大學工學部研究報告 |
| Journal Title(alt): | Bulletin of the Faculty of Engineering, Hokkaido University |
| Volume: | 112 |
| Start Page: | 57 |
| End Page: | 67 |
| Type: | bulletin (article) |
| URI: | http://hdl.handle.net/2115/41768 |
| Appears in Collections: | 北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.112
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