University of Illinois Urbana-Champaign

Multitarget Sputtering Using Decoupled Plasma

Wickersham, C.E.; Greene, J.E.

Content Files
B10-726.pdf

Permalink

https://hdl.handle.net/2142/73954

Description

Title
Multitarget Sputtering Using Decoupled Plasma
Author(s)
  • Wickersham, C.E.
  • Greene, J.E.
Issue Date
1976-04
Keyword(s)
  • Semiconductors
  • Sputtering
  • Thin films
Date of Ingest
  • 2015-04-06T20:45:26Z
  • 2017-07-14T22:54:41Z
Publisher
Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report Name or Number
Coordinated Science Laboratory Report no. UILU-ENG 76-2214, R-726
Type of Resource
text
Genre of Resource
Report (Grant or Annual)
Language
English
Permalink
http://hdl.handle.net/2142/73954
Sponsor(s)/Grant Number(s)
Joint Services Electronics Program / DAAB-07-72-C-0259

Owning Collections

Report - Coordinated Science Laboratory PRIMARY