Theoretical, Experimental, and Numerical Investigations Into Laser Repair of Adhered MEMS Structures
Rogers, James W.
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https://hdl.handle.net/2142/83779
Description
Title
Theoretical, Experimental, and Numerical Investigations Into Laser Repair of Adhered MEMS Structures
Author(s)
Rogers, James W.
Issue Date
2002
Doctoral Committee Chair(s)
Leslie M. Phinney
Department of Study
Mechanical Engineering
Discipline
Mechanical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Mechanical
Language
eng
Abstract
A MEMS temperature sensor based on the buckling of fixed-fixed beams due to thermal expansion is designed, fabricated, and tested. Difficulties from fabrication including residual stress, and limited temporal and spatial resolution of the imaging system hindered the device performance, but fixed-fixed MEMS beams are used estimate the temperature difference between the beam and substrate and cooling time after laser irradiation.
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