Article (Scientific journals)
Quantitative accelerated life testing of MEMS accelerometers
Bazu, Marius; Gălăţeanu, Lucian; Ilian, Virgil Emil et al.
2007In Sensors, 7 (11), p. 2846
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Keywords :
reliability; accelerometers; MEMS; Vibration; tilting
Abstract :
[en] Quantitative Accelerated Life Testing (QALT) is a solution for assessing the reliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shown in this paper and an attempt to assess the reliability level for a batch of MEMS accelerometers is reported. The testing plan is application-driven and contains combined tests: thermal (high temperature) and mechanical stress. Two variants of mechanical stress are used: vibration (at a fixed frequency) and tilting. Original equipment for testing at tilting and high temperature is used. Tilting is appropriate as application-driven stress, because the tilt movement is a natural environment for devices used for automotive and aerospace applications. Also, tilting is used by MEMS accelerometers for anti-theft systems. The test results demonstrated the excellent reliability of the studied devices, the failure rate in the “worst case” being smaller than 10-7h-1.
Disciplines :
Physical, chemical, mathematical & earth Sciences: Multidisciplinary, general & others
Author, co-author :
Bazu, Marius;  IMT- Bucharest > National Institute for R&D in Microtechnologies
Gălăţeanu, Lucian;  IMT - Bucharest > National Institute for R&D in Microtechnologies
Ilian, Virgil Emil;  IMT - Bucharest > National Institute for R&D in Microtechnologies
Loicq, Jerôme ;  Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Habraken, Serge ;  Université de Liège - ULiège > Département de physique > Optique - Hololab - CSL (Centre Spatial de Liège)
Collette, Jean-Paul ;  Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Language :
English
Title :
Quantitative accelerated life testing of MEMS accelerometers
Publication date :
2007
Journal title :
Sensors
ISSN :
1424-8220
eISSN :
1424-3210
Publisher :
Multidisciplinary Digital Publishing Institute (MDPI), Switzerland
Volume :
7
Issue :
11
Pages :
2846
Peer reviewed :
Peer Reviewed verified by ORBi
Available on ORBi :
since 09 June 2010

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