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微細段差形状の高速高精度光応用3次元形状測定法 (キーノートスピーチ)
https://doi.org/10.24517/00049992
https://doi.org/10.24517/00049992874a3f4c-d959-495b-91f4-cc9c89b958f4
名前 / ファイル | ライセンス | アクション |
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TE-PR-ADACHI-M-799.pdf (1.1 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2018-06-15 | |||||
タイトル | ||||||
タイトル | 微細段差形状の高速高精度光応用3次元形状測定法 (キーノートスピーチ) | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | High-speed high-precision optical measurement technologies for 3D shape of a small step-like object | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
ID登録 | ||||||
ID登録 | 10.24517/00049992 | |||||
ID登録タイプ | JaLC | |||||
著者 |
安達, 正明
× 安達, 正明 |
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著者別表示 |
Adachi, Masaaki
× Adachi, Masaaki |
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提供者所属 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 金沢大学理工研究域機械工学系 | |||||
書誌情報 |
精密工学会学術講演会講演論文集 en : 2009 JSPE Spring Meeting 巻 2009 Spring, 号 K31, p. 799-800, 発行日 2009 |
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NCID | ||||||
識別子タイプ | NCID | |||||
関連識別子 | BA90159927 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.11522/pscjspe.2009S.0.799.0 | |||||
出版者 | ||||||
出版者 | 精密工学会 = The Japan Society for Precision Engineering | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Vertical-scanning interferometries using white light are widely used to measure 3D shape of small step-like objects with high speed and high precision. This type of interferometry is being refined for more precision, more speed and more stable even in vibrating environment. In this key-note speech, I summarize our research processes to obtain high-speed and high-precision performance in 3D-shape measurement. Our processes have included technologies using two color LED, new phase shift algorithm, and an optical path difference(OPD) meter. I briefly compare our technologies with newly proposed techniques. I hope my comparison will stimulate many kinds of discussions. 微細段差加工が多用される時代を迎え,光干渉を用いた3次元形状測定技術は扱いやすさ,高速性,高精度性などから色んな所で使われています.この形状測定技術はさらなる高精度性や高速性の追求,また振動下での応用等を求めて種々の手法がまだまだ導入されつつあります.ここでは我々が開発してきた手法を紹介し,それとの簡単な比較を通して各種の手法に関する皆様の活発な議論の展開を図りたいと思います. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 出版者照会後に全文公開 | |||||
権利 | ||||||
権利情報 | Copyright © The Japan Society for Precision Engineering | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.jstage.jst.go.jp/browse/pscjspe/-char/ja/ | |||||
関連名称 | https://www.jstage.jst.go.jp/browse/pscjspe/-char/ja/ | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://www.jspe.or.jp/ | |||||
関連名称 | http://www.jspe.or.jp/ |