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パルスYAGレーザによるSiウエハの割断機構に関する研究
http://hdl.handle.net/2297/39093
http://hdl.handle.net/2297/390931465ee89-cf9d-4759-95d9-3562f63adafd
名前 / ファイル | ライセンス | アクション |
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TE-PR-UEDA-T-1861.pdf (5.2 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2017-10-03 | |||||
タイトル | ||||||
タイトル | パルスYAGレーザによるSiウエハの割断機構に関する研究 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Studies on Cleaving Mechanism of Silicon Wafer with Pulsed YAG Laser | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
山田, 啓司
× 山田, 啓司× 大礒, 桂一× 細川, 晃× 上田, 隆司 |
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書誌情報 |
精密工学会誌 = Journal of the Japan Society of Precision Engineering 巻 67, 号 11, p. 1861-1865, 発行日 2001-11-05 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0912-0289 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 10.2493/jjspe.67.1861 | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN1003250X | |||||
出版者 | ||||||
出版者 | 精密工学会 = The Japan Society for Precision Engineering | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | The thermal stress cleaving of silicon wafer with a laser beam is a prospective technique, which supersedes the mechanical dicing. This method makes it possible to cut a wafer at very high production rate in comparison with the diamond thin blade wheel and to protect the wafer from the contamination of cutting coolant and chips. In this paper, the cleaving mechanism of silicon wafer irradiated with the pulsed Nd:YAG laser is investigated. The temperature at the area irradiated with laser is measured using two-color pyrometer with an optical fiber. The acoustic emission is also measured to examine the mechanism of the crack propagation. In the process, the temperature at the area irradiated with laser should be controlled in order to reduce the thermal damages and to improve the cleaving accuracy. | |||||
権利 | ||||||
権利情報 | Copyright © 2007 The Japan Society for Precision Engineering 精密工学会 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://www.jspe.or.jp/ | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.jstage.jst.go.jp/browse/jjspe | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://ci.nii.ac.jp/naid/110001373065 |