ダウンロード数: 271
このアイテムのファイル:
ファイル | 記述 | サイズ | フォーマット | |
---|---|---|---|---|
1.3594095.pdf | 861.99 kB | Adobe PDF | 見る/開く |
タイトル: | Improvement of sensitivity in high-resolution Rutherford backscattering spectroscopy |
著者: | Hashimoto, H. Nakajima, K. https://orcid.org/0000-0002-5390-1262 (unconfirmed) Suzuki, M. https://orcid.org/0000-0002-6473-9141 (unconfirmed) Sasakawa, K. Kimura, K. |
キーワード: | focal planes ions microchannel plates Rutherford backscattering spectrometers |
発行日: | Jun-2011 |
出版者: | American Institute of Physics |
誌名: | REVIEW OF SCIENTIFIC INSTRUMENTS |
巻: | 82 |
号: | 6 |
論文番号: | 063301 |
抄録: | The sensitivity (limit of detection) of high-resolution Rutherford backscattering spectroscopy (HRBS) is mainly determined by the background noise of the spectrometer. There are two major origins of the background noise in HRBS, one is the stray ions scattered from the inner wall of the vacuum chamber of the spectrometer and the other is the dark noise of the microchannel plate (MCP) detector which is commonly used as a focal plane detector of the spectrometer in HRBS. In order to reject the stray ions, several barriers are installed inside the spectrometer and a thin Mylar foil is mounted in front of the detector. The dark noise of the MCP detector is rejected by the coincidence measurement with the secondary electrons emitted from the Mylar foil upon the ion passage. After these improvements, the background noise is reduced by a factor of 200 at a maximum. The detection limit can be improved down to 10 ppm for As in Si at a measurement time of 1 h under ideal conditions. |
著作権等: | Copyright 2011 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in REVIEW OF SCIENTIFIC INSTRUMENTS 82, 063301 (2011) and may be found at http://link.aip.org/link/?rsi/82/063301 |
URI: | http://hdl.handle.net/2433/160664 |
DOI(出版社版): | 10.1063/1.3594095 |
PubMed ID: | 21721683 |
関連リンク: | http://link.aip.org/link/?rsi/82/063301 |
出現コレクション: | 学術雑誌掲載論文等 |
このリポジトリに保管されているアイテムはすべて著作権により保護されています。