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http://hdl.handle.net/2445/98759| Title: | Excimer laser induced deposition of copper from Cu(hfac)(TMVS) |
| Author: | Izquierdo, Ricardo Bertomeu i Balagueró, Joan Suys, Marc Sacher, Edward Meunier, Michel |
| Keywords: | Coure Làsers Pel·lícules metàl·liques Copper Lasers Metallic films |
| Issue Date: | 1995 |
| Publisher: | Elsevier B.V. |
| Abstract: | Copper films have been deposited on TiN and fluoropolymer substrates from the KrF excimer-laser-assisted decomposition of Cu(hfac)(TMVS). Using H2 as the carrier gas, very uniform, shiny metal-like films were deposited with grain size of 50 to 100 nm. XPS measurements show that the precursor is reduced to metallic copper, and that a Cu/C atomic ratio of up to 17 is obtained. |
| Note: | Versió postprint del document publicat a: http://dx.doi.org/10.1016/0169-4332(94)00439-0 |
| It is part of: | Applied Surface Science, 1995, vol. 86, num. 1-4, p. 509-513 |
| URI: | http://hdl.handle.net/2445/98759 |
| Related resource: | http://dx.doi.org/10.1016/0169-4332(94)00439-0 |
| ISSN: | 0169-4332 |
| Appears in Collections: | Articles publicats en revistes (Física Aplicada) |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 114375.pdf | 600.88 kB | Adobe PDF | View/Open |
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