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https://hdl.handle.net/10356/5098
Title: | A study on the orientated growth, microstructure and thermal conductivity of RF reactively sputtered AIN films | Authors: | Cheng, Hao | Keywords: | DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films | Issue Date: | 2005 | Source: | Cheng, H. (2005). A study on the orientated growth, microstructure and thermal conductivity of RF reactively sputtered AIN films. Doctoral thesis, Nanyang Technological University, Singapore. | Abstract: | In this study AIN films have been deposited by reactive sputtering in argon and nitrogen gas mixture. The orientated growth in the sputtered AIN films has been systematically studied. | URI: | https://hdl.handle.net/10356/5098 | DOI: | 10.32657/10356/5098 | Schools: | School of Materials Science & Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | open | Fulltext Availability: | With Fulltext |
Appears in Collections: | MSE Theses |
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MSE-THESES_6.pdf | 8.42 MB | Adobe PDF | View/Open |
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