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(A)Study on the fabrication and characterization of ferroelectric thin films for nonvolatile memory devices : 비휘발성 메모리소자를 위한 강유전 박막의 형성 및 특성 평가에 관한 연구
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- Authors
- Advisor
- 주승기
- Issue Date
- 2006
- Publisher
- 서울대학교 대학원
- Keywords
- PZT ; PZT ; 타이타늄 ; Ti ; 강유전체 ; ferroelectric material ; 비휘발성 기억소자 ; non-volatile memory ; FeRAM ; FeRAM ; 저온 결정화 ; seed layer ; SOG ; low temperature crystallization ; SOG
- Description
- Thesis(doctor`s)--서울대학교 대학원 :재료공학부,2006.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000048695
https://hdl.handle.net/10371/12626
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