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CVD로 증착된 Ru 박막의 응력 거동 분석 및 결정립 성장 억제
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- Authors
- Advisor
- 김형준
- Issue Date
- 2003
- Publisher
- 서울대학교 대학원
- Keywords
- Ru ; Ru ; 박막 ; Thin film ; 전극 ; Electrode ; 응력 ; Stress ; 결정립 성장 ; Grain growth ; 배향성 ; Orientation
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2003.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000057668
https://hdl.handle.net/10371/14683
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