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열 필라멘트법을 이용한 박막태양전지용 실리콘 박막 증착 : Silicon thin films for solar cells by hot wire chemical vapor deposition
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- Authors
- Advisor
- 황농문
- Issue Date
- 2009
- Publisher
- 서울대학교 대학원
- Keywords
- 하전된 나노입자 ; charged nanoparticles ; 열 필라멘트화학증착법 ; hot wire chemical vapor deposition ; 실리콘 박막 ; silicon thin films ; 박막 태양전지 ; thin film solar cells ; 전기전도도 ; conductivity ; 증착속도 ; growth rate ; 결정성 ; crystallinity
- Description
- 학위논문(석사) --서울대학교 대학원 :재료공학부,2009.8.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000038691
https://hdl.handle.net/10371/14777
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