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Synthesis and characterization of porogen-bridged organosilicate polymers for spin-on ultra-low dielectric films : 초-저유전상수 박막 응용을 위한 유기실리케이트 고분자합성 및 특성에 관한 연구
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- Authors
- Advisor
- 윤도영
- Major
- 화학부
- Issue Date
- 2011-02
- Publisher
- 서울대학교 대학원
- Keywords
- 초 저 유전상수 ; 기공형성제 ; 유기실리케이트 ; 나노기공유기실리케이트 ; ultralow-dielectric constant ; porogen bridged monomers ; nanoporous thin films ; pore structures
- Description
- 학위논문 (석사)-- 서울대학교 대학원 : 화학부, 2011.2. 윤도영.
- Language
- eng
- URI
- https://hdl.handle.net/10371/160192
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000029568
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