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몸체 미세 가공 기술을 이용한 비틀림형 실리콘 가속도계의 제작
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- Authors
- Advisor
- 전국진
- Issue Date
- 1999
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :전기공학부,1999.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000072450
https://hdl.handle.net/10371/36652
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