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높은 선택비와 매끄러운 식각 표면을 갖는 BCB 식각 공정에 관한 연구
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- Authors
- Advisor
- 전국진
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- BCB ; Bcb ; 건식 식각 ; Dry etching ; micromasking ; Micromasking ; Au mask ; Au mask ; MEMS ; Mems
- Description
- 학위논문(석사)--서울대학교 대학원 :전기·컴퓨터공학부,2004.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000053679
https://hdl.handle.net/10371/48335
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