Study of surface morphology of Ag thin films prepared by sputtering and irradiation with keV Ar ion beam

0585810 - ÚJF 2025 RIV GB eng J - Článek v odborném periodiku
Vacík, Jiří - Ceccio, Giovanni - Lavrentiev, Vasyl - Mikšová, Romana - Havránek, Vladimír - Pleskunov, P. - Cannavo, A.
Study of surface morphology of Ag thin films prepared by sputtering and irradiation with keV Ar ion beam.
Radiation Effects and Defects in Solids. Roč. 179, 1-2 (2024), s. 136-145. ISSN 1042-0150. E-ISSN 1029-4953
Grant CEP: GA ČR GA23-05002S
Institucionální podpora: RVO:61389005
Klíčová slova: Ion sputteringion irradiation * Ag film * nanostructure * black metals * AFM * RBS * SEM
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)
Impakt faktor: 1, rok: 2022
Způsob publikování: Omezený přístup
https://doi.org/10.1080/10420150.2024.2318720

In this paper, the possibility of preparing silver nanostructures with a high area density of nanoparticles of various shapes by the ion beam sputtering (IBS) method, using a glancing angle deposition (GLAD) configuration, and subsequent irradiation with heavy ions, was tested. In the experiment, keV Ar+ ions were used for both IBS and bombardment. The prepared nanostructures were analyzed by RBS and microscopic methods of SEM and AFM. It turned out that IBS/GLAD makes it possible to create silver nanostructures (networks of individual silver nanoparticles), but only with relatively low areal densities (similar to 70 mu m2). The bombardment led to changes in the porosity only after high ion fluences, but also to disruption of the nanostructures. Even so, the IBS method with GLAD configuration has been shown to be a promising way to prepare high-porosity nanostructures. Nevertheless, further experimental efforts will be needed to find the optimal technology.
Trvalý link: https://hdl.handle.net/11104/0353483