EMPIRICAL FORMULATION OF BRIDGE INDUCTANCE IN INDUCTIVELY TUNED RF MEMS SHUNT SWITCHES

Download

index.pdf

Date

2009-01-01

Author

Topallı, Kagan.
ÜNLÜ, MEHMET
Atasoy, Halil İbrahim
Aydın Çivi, Hatice Özlem
Demir, Şimşek
AKIN, TAYFUN

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

102
views

63
downloads

This paper presents a substrate independent empirical formulation for the bridge inductance of inductively tuned RF MEMS shunt switches, allowing a systematic design approach to tune their isolation bands. Inductive tuning of RF MEMS switches is achieved by inserting recesses in the ground plane and meanders to the bridges, allowing the tuning of the isolation band of the switch from the X-band to the mm-wave band. The bridge inductance is first extracted from parametric EM simulations of the RF MEMS shunt switches and then fitted to the proposed formulations using empirical coefficients. The accuracy of the formulations is verified with the measurements on the switches that are fabricated using an in-house surface micromachining RF MEMS process on a 500-mu m thick glass substrate. Measurement results verify that the bridge inductances can be determined by the provided empirical formulation.

URI

https://hdl.handle.net/11511/32946

Journal

PROGRESS IN ELECTROMAGNETICS RESEARCH-PIER

DOI

https://doi.org/10.2528/pier09092502

Collections

Department of Electrical and Electronics Engineering, Article

Suggestions

OpenMETU
Core

Mutual coupling of printed elements on a cylindrically layered structure using closed-form Green's functions Acar, R. C.; Dural, G. (EMW Publishing, 2008-01-01) A hybrid method to calculate mutual coupling of electric or magnetic current elements on a cylindrically layered structure using closed-form Green's functions is presented. When rho = rho' and phi is not very close to phi', closed-form Green's functions are employed in the calculation of MoM matrix entries. When both rho = rho' and phi = phi', series representation of the spectral domain Green's functions do not converge, therefore closed-form Green's functions can not be employed. In that case MoM matrix e...
Performance Evaluation and Selection of PWM Switching and Control Methods for Grid Connected Modular Multilevel Converters Ciftci, Baris; Hava, Ahmet Masum (2015-09-24) This paper focuses on the determination of suitable carrier based pulse width modulation (PWM) switching and control methods for grid connected modular multilevel converters (MMCs). Characterization of various level-shifted and phase-shifted carrier based PWM methods are provided in terms of output voltage waveforms both for N+1 and 2N+1 level output phase voltages. Carrier based PWM method based control approaches are evaluated for MMC. Performances of different control methods are evaluated and compared f...
Design of tunable impedance matching circuit for a GSM antenna Öztürk, Mehmet Ali; Aydın Çivi, Hatice Özlem; Koçer, Fatih; Department of Electrical and Electronics Engineering (2015) In this thesis, automatic impedance matching circuits are designed by using several tuning approaches. A typical automatic impedance matching system compensates for the impedance variations of the antenna due to the human hand and head using an electronically tunable impedance matching circuitry. Maximum output power, the linearity and efficiency of PA can be improved using automatic impedance matching circuit units. There are various tunable impedance matching circuits proposed in the literature to enhance...
Structural Analysis of Synchronization in Networks of Linear Oscillators Tuna, Sezai Emre (2022-07-01) In undirected networks of identical linear oscillators coupled through dissipative and restorative connectors (e.g., pendulums undergoing small vibrations connected via dampers and springs), the relation between asymptotic synchronization and coupling structure is studied. Conditions on the interconnection under which synchronization can be achieved for some selection of coupling strengths are established. How to strengthen those conditions so that synchronization is guaranteed for all admissible parameter ...
Comparison of Linear and Nonlinear Modal Reduction Approaches Ferhatoğlu, Erhan; Dreher, Tobias; Ciğeroğlu, Ender; Krack, Malte; Özgüven, Hasan Nevzat (null; 2019-01-31) Periodic vibration response of nonlinear mechanical systems can be efficiently computed using Harmonic Balance Method. However, computational burden may still be considerable and impede extensive parametric studies needed for, e.g., design optimization and prediction of vibration response especially when the degree of freedom is very large. In this work, the methods which had been previously developed by the authors for further model order reduction to one or a few coordinates are compared. The focus is pla...

Citation Formats

K. Topallı, M. ÜNLÜ, H. İ. Atasoy, H. Ö. Aydın Çivi, Ş. Demir, and T. AKIN, “EMPIRICAL FORMULATION OF BRIDGE INDUCTANCE IN INDUCTIVELY TUNED RF MEMS SHUNT SWITCHES,” PROGRESS IN ELECTROMAGNETICS RESEARCH-PIER, pp. 343–356, 2009, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/32946.