Design and prototyping of second generation METU MEMS electromagnetic micro-power generators

Date

2010-12-01

Author

Turkyilmaz, Serol
Külah, Haluk
Muhtaroglu, Ali

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This paper presents an electromagnetic (EM) vibration to electrical power generator which can effectively harvest energy from low frequency external vibrations. The reported second generation MEMS energy scavenger module up-converts low frequency environmental vibrations before mechanical-to-electrical conversion. Power is generated through planar electromagnetic induction using a magnet on the low frequency actuation plane, and coils on the high frequency resonance plane. The proposed approach has been demonstrated using a macro-scale prototype, which provides 5.1 μW maximum power and 11.1 mV maximum voltage. When scaled to micro-electromechanical (MEMS) dimensions, the expected maximum power and voltage from the 10 × 8.5 × 2.5 mm 3 generator is 119 nW and 15.2 mV respectively. This system provides more than three orders of magnitude improvement in energy efficiency for 70-150 Hz ambient vibration range, compared to the first generation MEMS Energy scavenger module.

Subject Keywords

Micromechanical devices, Coils, Vibrations, Magnetic resonance, Metals, Mathematical model, Magnetomechanical effects

URI

https://hdl.handle.net/11511/36591

DOI

https://doi.org/10.1109/iceac.2010.5702292

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

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Citation Formats

S. Turkyilmaz, H. Külah, and A. Muhtaroglu, “Design and prototyping of second generation METU MEMS electromagnetic micro-power generators,” 2010, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/36591.