Overview on established and novel FIB based miniaturized mechanical testing 
using in-situ SEM

Kiener, Daniel; Motz, Christian; Dehm, Gerhard; Pippan, Reinhard

doi:10.3139/146.110149

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Overview on established and novel FIB based miniaturized mechanical testing using in-situ SEM

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Kiener, D., Motz, C., Dehm, G., & Pippan, R. (2009). Overview on established and novel FIB based miniaturized mechanical testing using in-situ SEM. International Journal of Materials Research, 100(8), 1074-1087. doi:10.3139/146.110149.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0024-565D-A

Abstract

Probing mechanical properties in the micrometer regime is of current interest in materials science. A focused ion beam microscope was employed to fabricate miniaturized specimens, while an indenter installed in a scanning electron microscope was utilized to actuate the samples and record the load and displacement data during the deformation. Examples for miniaturized compression, tension, bending, as well as newly developed bending fatigue and bending fracture experiments are presented, demonstarting the unique flexibility on in-situ mechanical testing in the scanning electron microscope at small length scales.