Dependence of energy distributions of sputtered and reflected atoms on incident 
fluence

Eckstein, W.; Dohmen, R.; Friedrich, H.; Hertweck, F.

doi:10.1016/S0168-583X(98)01016-7

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Dependence of energy distributions of sputtered and reflected atoms on incident fluence

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Eckstein, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Dohmen, R.
Computer Center Garching (RZG), Max Planck Institute for Plasma Physics, Max Planck Society;

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Eckstein, W., Dohmen, R., Friedrich, H., & Hertweck, F. (1999). Dependence of energy distributions of sputtered and reflected atoms on incident fluence. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 153(1-4), 345-349. doi:10.1016/S0168-583X(98)01016-7.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-8551-0

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