Richter, Gunther Central Scientific Facility Thin Film Laboratory, Max Planck Institute for Intelligent Systems, Max Planck Society;
Bagheri, S., Zgrabik, C. M., Gissibl, T., Tittl, A., Sterl, F., Walter, R., et al. (2015). Large-area fabrication of TiN nanoantenna arrays for refractory plasmonics in the mid-infrared by femtosecond direct laser writing and interference lithography. Optical materials express, 5(11), 2625-2633. doi:10.1364/OME.5.002625.