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Polarization and coherence-engineered illumination with applications in imaging

URL to cite or link to: http://hdl.handle.net/1802/12384

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PDF of dissertation (UR-only until 8/2011)
Thesis (Ph. D.)--University of Rochester. Institute of Optics, 2010.
In image formation, the coherence properties of the illumination source are of great importance. At the same time, the polarization properties of an optical system also play a role in the quality of an imaging system, particularly those of high numerical aperture (NA). Polarization-dependent coherence is therefore an important area of study for any imaging system. In the past few years, while there has been a unification of the ability to use coherence theory to describe vectorial fields through the use of a construct called a correlation matrix, very little has been done experimentally predicting or measuring the coherence properties of an illumination system comprised of vectorial fields. In the work that follows, we explore several arrangements in which a polarization vortex mode converter was placed in the pupil plane of an illumination system. In these arrangements, we study both theoretically and experimentally the spatially dependent coherence properties using a vectorial treatment of optical coherence. Those properties were applied to imaging systems that then results in an improvement in image contrast using polarization- and orientation-dependent coherence properties of the illumination. In this work, the main illumination systems we explored are a Gaussian Schellmodel beam, a fully correlated and ‘collimated’ azimuthal vortex beam, a partially correlated azimuthally-polarized vortex (PCAV) illumination system, and a partially correlated radially-polarized vortex (PCRV) illumination system. For the case of PCAV and PCRV illumination, we implemented critical and K¨ohler illumination systems with a polarization orientation that has an azimuthal or radial symmetry in the pupil plane. We demonstrated first theoretically and then experimentally that PCAV and PCRV illumination systems have a correlation matrix that describes the correlation between electric fields as being only dependent on the separation of points at a particular plane. Further, it was demonstrated that when comparing the fields at two points in this plane separated by a certain distance, these fields are correlated or in phase for one polarization orientation and anti-correlated or ! out of phase for the orthogonal polarization. In imaging systems, fields that are in phase constructively interfere while fields that are ! out of phase destructively interfere. Thinking about a simple two-point imaging experiment, destructive interference would result in a higher contrast and constructive interference a lower contrast than that from an incoherent imaging system with no interference of the fields. Therefore when using vortex illumination like PCAV illumination, image fields polarized parallel to features in the image will produce an image with higher contrast due to anti-correlated fields in the image plane. In the following work, we theoretically and experimentally demonstrated polarization- and orientation-dependent contrast enhancement in imaging systems with low to moderate numerical apertures. Finally, a mathematical treatment of the correlation properties of very high NA systems was also presented, in which we explored the consequences of increasing the illumination system NA and changing the pupil apodization function. For numerical apertures above about 0.4 it began to be apparent that the longitudinal component of the illumination field at the object plane was important to consider when trying to describe the correlation properties of PCRV illumination. We found that PCAV illumination remains transverse for high NAs and could be still described using a 2x2 correlation matrix. However, because PCRV illumination has polarization components in three dimensions at the object plane, the correlation properties had to be represented using a 3x3 correlation matrix. By exploring the effects polarization has on the coherence properties of an illumination system and consequentially on an imaging system, we continue the scientific exploration of the important link between polarization and coherence. Having the ability to engineer specific polarization-dependent anti-correlations in an illumination system or, more generally, the ability to determine the polarization and coherence properties of any illuminator at some object plane experimentally will give optical designers yet another tool to use when designing and optimizing imaging and even non-imaging systems.
Contributor(s):
Dean Patterson Brown (1981 - ) - Author

Thomas G. Brown (1957 - ) - Thesis Advisor

Primary Item Type:
Thesis
Language:
English
Subject Keywords:
Polarization; Partial coherence; Polarization vortex; Interferometry
Sponsor - Description:
Semiconductor Research Corporation - Contract 1407.001
KLA-Tencor Corporation -
First presented to the public:
8/1/2011
Originally created:
2010
Date will be made available to public:
2011-08-01   
Original Publication Date:
2010
Previously Published By:
University of Rochester.
Citation:
Extents:
Number of Pages - xxvi, 176 leaves
License Grantor / Date Granted:
Marcy Strong / 2010-08-30 11:32:45.347 ( View License )
Date Deposited
2010-08-30 11:32:45.347
Date Last Updated
2016-12-13 19:26:07.829656
Submitter:
Marcy Strong

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