Characterizing Effective d31 Values for PZT from the Nonlinear Oscillations of Clamped-Clamped Micro- Resonators

Date
2013
Journal Title
Journal ISSN
Volume Title
Publisher
Journal of Mechanical Engineering
Description
Abstract

In order to accurately predict the performance of micro-electromechanical systems which use piezoelectric material, precise knowledge of the piezoelectric coefficients is critical. Current material characterization methods rely on either simple structures restricted to small amplitude, linear oscillations or consider the piezoelectric material separate from the specific micro-scale device. A method is proposed for the characterization of the effective transverse piezoelectric coefficient d31 of lead zirconate titanate in a clamped-clamped micro-beam resonator experiencing nonlinear oscillations. Parameter trends identified by using a parametric identification scheme are analyzed and an approach is presented to calculate the linear piezoelectric coefficient. This method utilizes the relationship between a DC bias added to the excitation signal and the frequency shift experienced by the nonlinear response behavior. Through an additional numerical study, the sensitivity of the results to changes in the device length is identified and all data sets provide the same coefficient value when a length variation of less than 2% is allowed.

Description
Advisor
Degree
Type
Journal article
Keywords
Citation

Dick, Andrew J.. "Characterizing Effective d31 Values for PZT from the Nonlinear Oscillations of Clamped-Clamped Micro- Resonators." Journal of Mechanical Engineering, 59, no. 1 (2013) Journal of Mechanical Engineering: 50-55. http://dx.doi.org/10.5545/sv-jme.2012.673.

Has part(s)
Forms part of
Rights
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Link to license
Citable link to this page