Treatment of SU-8 surfaces using atmospheric pressure dielectric barrier discharge plasma

Treatment of SU-8 surfaces using atmospheric pressure dielectric barrier discharge plasma

Juliana de Novais Schianti, Fellype do Nascimento, Jhonattan Cordoba Ramirez, Munemasa Machida, Lucas Heitzmann Gabrielli, Hugo Enrique Hernandez-Figueroa and Stanislav Moshkalev

ARTIGO

Inglês

Agradecimentos: The authors thank M. A. Canesqui (CCS Nano, UNICAMP) for the AFM images. The authors also thank the Brazilian Nanotechnology National Laboratory (LNNano, CNPEM, Brazil) for the XPS analysis. This work was supported by CNPq (Process No. 400659/2013-1)

Abstract: Dielectric barrier discharge (DBD) plasma was used to change the wettability of a SU-8 photoresist, reducing the contact angle and improving the surface smoothness. As most polymers, SU-8 has hydrophobic surfaces which prevents the adhesion of biological samples when used to fabricate...

CONSELHO NACIONAL DE DESENVOLVIMENTO CIENTÍFICO E TECNOLÓGICO - CNPQ

400659/2013-1

Fechado

Treatment of SU-8 surfaces using atmospheric pressure dielectric barrier discharge plasma

Juliana de Novais Schianti, Fellype do Nascimento, Jhonattan Cordoba Ramirez, Munemasa Machida, Lucas Heitzmann Gabrielli, Hugo Enrique Hernandez-Figueroa and Stanislav Moshkalev

										

Treatment of SU-8 surfaces using atmospheric pressure dielectric barrier discharge plasma

Juliana de Novais Schianti, Fellype do Nascimento, Jhonattan Cordoba Ramirez, Munemasa Machida, Lucas Heitzmann Gabrielli, Hugo Enrique Hernandez-Figueroa and Stanislav Moshkalev

    Fontes

    Journal of vacuum science and technology. A, International journal devoted to vacuum, surfaces, and films

    Vol. 36, n. 2 (Mar., 2018), n. art. 21403, p. 1-7