Treatment of SU-8 surfaces using atmospheric pressure dielectric barrier discharge plasma
ARTIGO
Inglês
Agradecimentos: The authors thank M. A. Canesqui (CCS Nano, UNICAMP) for the AFM images. The authors also thank the Brazilian Nanotechnology National Laboratory (LNNano, CNPEM, Brazil) for the XPS analysis. This work was supported by CNPq (Process No. 400659/2013-1)
Abstract: Dielectric barrier discharge (DBD) plasma was used to change the wettability of a SU-8 photoresist, reducing the contact angle and improving the surface smoothness. As most polymers, SU-8 has hydrophobic surfaces which prevents the adhesion of biological samples when used to fabricate...
Abstract: Dielectric barrier discharge (DBD) plasma was used to change the wettability of a SU-8 photoresist, reducing the contact angle and improving the surface smoothness. As most polymers, SU-8 has hydrophobic surfaces which prevents the adhesion of biological samples when used to fabricate biochemical sensors. Here, DBD Plasma treatment was conducted over the SU-8 surface, reducing the contact angle from 78 degrees to 12 degrees. The advantage of this treatment is that the SU-8 surface maintains the hydrophilic surface behavior over 24 h time period. DBD plasma modified the SU-8 surface wettability under low temperature variation and does not cause great irregularities on the surface. The highest value of root mean square surface roughness after 10min exposure was 2.9 +/- 0.3 nm
CONSELHO NACIONAL DE DESENVOLVIMENTO CIENTÍFICO E TECNOLÓGICO - CNPQ
400659/2013-1
Fechado
DOI: https://doi.org/10.1116/1.4999045
Texto completo: https://avs.scitation.org/doi/abs/10.1116/1.4999045
Treatment of SU-8 surfaces using atmospheric pressure dielectric barrier discharge plasma
Treatment of SU-8 surfaces using atmospheric pressure dielectric barrier discharge plasma
Fontes
Journal of vacuum science and technology. A, International journal devoted to vacuum, surfaces, and films Vol. 36, n. 2 (Mar., 2018), n. art. 21403, p. 1-7 |