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Unpublished conference/Abstract (Scientific congresses and symposiums)
Direct energy influx measurement in reactive magnetron sputtering
Cormier, P.A; Dolique, V.; Thomann, AL et al.
2011 • International Conference on Reactive Sputter Deposition 2011 - RSD2011
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https://hdl.handle.net/20.500.12907/11087
 

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Abstract :
[en] Direct energy influx measurement in reactive magnetron sputtering
Disciplines :
Chemistry
Physics
Author, co-author :
Cormier, P.A
Dolique, V.
Thomann, AL
Balhamri, Adil ;  Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface
Konstantinidis, Stéphanos  ;  Université de Mons > Faculté des Sciences > Service de Chimie des Interactions Plasma-Surface
Dussart, R
Semmar, N
Language :
English
Title :
Direct energy influx measurement in reactive magnetron sputtering
Publication date :
08 December 2011
Number of pages :
15
Event name :
International Conference on Reactive Sputter Deposition 2011 - RSD2011
Event place :
Linkoping, Sweden
Event date :
2011
Research unit :
S882 - Chimie des Interactions Plasma-Surface
Research institute :
R400 - Institut de Recherche en Science et Ingénierie des Matériaux
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since 26 January 2012

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