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Unpublished conference/Abstract (Scientific congresses and symposiums)
What controls the phase formation of reactively sputtered ZrO2 thin films?
Snyders, Rony
2014
•
72th IUVSTA workshop
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https://hdl.handle.net/20.500.12907/12064
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Research center :
CIRMAP - Centre d'Innovation et de Recherche en Matériaux Polymères
Disciplines :
Chemistry
Author, co-author :
Snyders, Rony
;
Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface
Language :
English
Title :
What controls the phase formation of reactively sputtered ZrO2 thin films?
Publication date :
09 April 2014
Number of pages :
30
Event name :
72th IUVSTA workshop
Event place :
Schloss Seggau , Austria
Event date :
2014
Research unit :
S882 - Chimie des Interactions Plasma-Surface
Research institute :
R400 - Institut de Recherche en Science et Ingénierie des Matériaux
Available on ORBi UMONS :
since 10 September 2014
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