Experimental evaluation of the role of oxygen on the growth of MgOx nano-sculpted thin films synthesized by reactive magnetron sputtering combined with glancing angle deposition
CIRMAP - Centre d'Innovation et de Recherche en Matériaux Polymères
Disciplines :
Chemistry
Author, co-author :
Geng, X.
Liang, H.
Li, W.J.
Panepinto, Adriano ; Université de Mons > Unités externes > Materia Nova ASBL
Thiry, Damien ; Université de Mons > Faculté des Sciences > Service de Chimie des Interactions Plasma-Surface
Chen, MF
Snyders, Rony ; Université de Mons > Faculté des Sciences > Service de Chimie des Interactions Plasma-Surface
Language :
English
Title :
Experimental evaluation of the role of oxygen on the growth of MgOx nano-sculpted thin films synthesized by reactive magnetron sputtering combined with glancing angle deposition
Publication date :
09 December 2020
Journal title :
Thin Solid Films
ISSN :
0040-6090
Publisher :
Elsevier, Switzerland
Volume :
718
Issue :
138480
Peer reviewed :
Peer Reviewed verified by ORBi
Research unit :
S882 - Chimie des Interactions Plasma-Surface
Research institute :
R400 - Institut de Recherche en Science et Ingénierie des Matériaux
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