Titanium and titanium oxide thin films deposition by 'Hot target' Magnetron Sputtering

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Caillard, Amaël; Graillot-Vuillecot, Robin; Thomann, A.L. et al.

2019 • 24th International Symposium on Plasma Chemistry

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https://hdl.handle.net/20.500.12907/22290

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Research center :

CIRMAP - Centre d'Innovation et de Recherche en Matériaux Polymères

Disciplines :

Architecture
Chemistry
Physics

Author, co-author :

Caillard, Amaël

Graillot-Vuillecot, Robin

Thomann, A.L.

Konstantinidis, Stéphanos ; Université de Mons > Faculté des Sciences > Service de Chimie des Interactions Plasma-Surface

Millon, Eric

Cachoncinlle, Christophe

Language :

English

Title :

Titanium and titanium oxide thin films deposition by 'Hot target' Magnetron Sputtering

Publication date :

10 June 2019

Event name :

24th International Symposium on Plasma Chemistry

Event place :

Naples, Italy

Event date :

2019

Research unit :

S882 - Chimie des Interactions Plasma-Surface

Research institute :

R400 - Institut de Recherche en Science et Ingénierie des Matériaux

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since 28 June 2019

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