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Abstract :
[en] WO3, activated by 1% Pt or 1% Pd, was deposited by radio frequency co-sputtering process. The as-sputtered films were thermally-treated at 450 °C for 24 h after co-sputtering. The microstructure, crystal structure and chemical composition of the as-sputtered and thermally-treated films were analyzed by SEM, XRD and XPS. The sensing characteristics of the Pt or Pd activated WO3 films, as well as the pure WO3 films, were characterized with 25-200 ppm H2, 25-200 ppm CO and 0.62-5 ppm NH3