Quantitative study of reactive HiPIMS discharge: the dynamics of the O ground state atoms

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Unpublished conference/Abstract (Scientific congresses and symposiums)

Britun, Nikolay; Belosludtsev, Alexandr; Konstantinidis, Stéphanos et al.

2016 • Int'l conference 'Reactive sputter deposition 2016' (RSD-2016)

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https://hdl.handle.net/20.500.12907/40836

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Disciplines :

Architecture
Physics

Author, co-author :

Britun, Nikolay ; Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface

Belosludtsev, Alexandr

Konstantinidis, Stéphanos ; Université de Mons > Faculté des Sciences > Service de Chimie des Interactions Plasma-Surface

Snyders, Rony ; Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface

Language :

English

Title :

Quantitative study of reactive HiPIMS discharge: the dynamics of the O ground state atoms

Publication date :

02 December 2016

Number of pages :

Event name :

Int'l conference 'Reactive sputter deposition 2016' (RSD-2016)

Event place :

Ghent, Belgium

Event date :

2016

Research unit :

S882 - Chimie des Interactions Plasma-Surface

Research institute :

R400 - Institut de Recherche en Science et Ingénierie des Matériaux

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