Time- and Energy-resolved Mass Spectrometry Study of a Reactive High-Power Impulse Magnetron Sputtering Discharge

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Poster (Scientific congresses and symposiums)

Palmucci, Maria; Snyders, Rony; Konstantinidis, Stéphanos

2012 • 5th Anniversary of the Center for Innovation and Research in MAterials and Polymers (CIRMAP)

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https://hdl.handle.net/20.500.12907/8170

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Research center :

CIRMAP - Centre d'Innovation et de Recherche en Matériaux Polymères

Disciplines :

Chemistry
Physics

Author, co-author :

Palmucci, Maria ; Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface

Snyders, Rony ; Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface

Konstantinidis, Stéphanos ; Université de Mons > Faculté des Sciences > Service de Chimie des Interactions Plasma-Surface

Language :

English

Title :

Time- and Energy-resolved Mass Spectrometry Study of a Reactive High-Power Impulse Magnetron Sputtering Discharge

Publication date :

26 October 2012

Number of pages :

Event name :

5th Anniversary of the Center for Innovation and Research in MAterials and Polymers (CIRMAP)

Event place :

Mons, Belgium

Event date :

2012

Research unit :

S882 - Chimie des Interactions Plasma-Surface

Research institute :

R400 - Institut de Recherche en Science et Ingénierie des Matériaux

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since 15 January 2013

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