Monolithic integration of phase change materials and aluminum nitride contour-mode MEMS resonators for highly reconfigurable radio frequency systems
Permanent URL:
http://hdl.handle.net/2047/D20194504
McGruer, Nicol (Committee member)
Onabajo, Marvin (Committee member)
germanium telluride
phase change material
piezoelectric resonator
RF switch
Radio frequency
Resonators -- Design
Switching circuits -- Materials
Microelectromechanical systems
Piezoelectric devices -- Design
Aluminum nitride
Germanium
Tellurium compounds
Copyright restrictions may apply.