Monolithic integration of phase change materials and aluminum nitride contour-mode MEMS resonators for highly reconfigurable radio frequency systems

Title:
Monolithic integration of phase change materials and aluminum nitride contour-mode MEMS resonators for highly reconfigurable radio frequency systems
Creator:
Hummel, Gwendolyn Eve (Author)
Contributor:
Rinaldi, Matteo (Advisor)
McGruer, Nicol (Committee member)
Onabajo, Marvin (Committee member)
Language:
English
Publisher:
Boston, Massachusetts : Northeastern University, 2015
Date Accepted:
August 2015
Date Awarded:
August 2015
Type of resource:
Text
Genre:
Masters theses
Format:
electronic
Digital origin:
born digital
Abstract/Description:
The problem today in the world of RF systems is the extremely crowded and rapidly changing modern military and commercial spectral environment. This increases the demand for highly reconfigurable, miniaturized, and low power RF system elements such as resonators and filters significantly. As a solution to this issue, resonators and filters with a switching element, integrated on the same substrate, can be used to build dynamically reconfigurable filters that can operate around different center frequency bands, and then within each frequency band, the roll-off, bandwidth, and order of the filter response can be programmed. The integration of a capacitor, switch, and resonator into a single device will reduce the insertion loss and size requirement of the system by minimizing the number of physically separated RF components. This thesis presents a unique solution by monolithically integrating phase change material switches and aluminum nitride contour-mode resonators to produce reconfigurable resonators for the realization of intrinsically switchable and reconfigurable filter banks.
Subjects and keywords:
contour-mode resonator
germanium telluride
phase change material
piezoelectric resonator
RF switch
Radio frequency
Resonators -- Design
Switching circuits -- Materials
Microelectromechanical systems
Piezoelectric devices -- Design
Aluminum nitride
Germanium
Tellurium compounds
DOI:
https://doi.org/10.17760/D20194504
Permanent Link:
http://hdl.handle.net/2047/D20194504
Use and reproduction:
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