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A digital twin for MEMS and NEMS

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Feng,  Lihong
Computational Methods in Systems and Control Theory, Max Planck Institute for Dynamics of Complex Technical Systems, Max Planck Society;

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Korvink, J., Poletkin, K., Deng, Y., & Feng, L. (2023). A digital twin for MEMS and NEMS. In M. Rudan, R. Brunetti, & S. Reggiani (Eds.), Springer Handbook of Semiconductor Devices, Part 4, Modeling (pp. 1303-1334). Cham, Switzerland: Springer.


Cite as: https://hdl.handle.net/21.11116/0000-0008-BB4D-0
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