s11071-023-08674-6.pdf (5.53 MB)
Triple sensing scheme based on nonlinear coupled micromachined resonators
journal contribution
posted on 2024-02-16, 14:41 authored by Zhengliang FangZhengliang Fang, Stephanos TheodossiadesStephanos Theodossiades, Amal HajjajAmal HajjajIn the past few decades, advances in micro-electromechanical systems (MEMS) have produced robust, accurate, and high-performance devices. Extensive research has been conducted to improve the selectivity and sensitivity of MEMS sensors by adjusting the device dimensions and adopting nonlinear features. However, sensing multiple parameters is still a challenging topic. Except for the limited research focus on multi-gas and multimode sensing, detecting multiple parameters typically relies on combining several separate MEMS sensors. In this work, a new triple sensing scheme via nonlinear weakly coupled resonators is introduced, which could simultaneously detect three different physical stimuli (including longitudinal acceleration) by monitoring the dynamic response around the first three lowest vibration modes. The Euler–Bernoulli beam model with three-mode Galerkin discretization is used to derive a reduced-order model considering the geometric and electrostatic nonlinearities to characterize the resonator's nonlinear dynamics under the influence of different stimuli. The simulation results show the potential of the nonlinear coupled resonator to simultaneously perform triple detection.
Funding
Micromachined based Multi-Sensing Solutions toward Digitized Industries : R/167260
Loughborough University
History
School
- Mechanical, Electrical and Manufacturing Engineering
Published in
Nonlinear DynamicsVolume
111Issue
24Pages
22185 - 22213Publisher
SpringerVersion
- VoR (Version of Record)
Rights holder
© The Author(s)Publisher statement
This is an Open Access article published by Springer Nature and is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.Acceptance date
2023-06-14Publication date
2023-07-03Copyright date
2023ISSN
0924-090XeISSN
1573-269XPublisher version
Language
- en