Development of polymeric systems for applications as resists in microelectronics technology
Date
1991
Authors
Wright, R. L.(Rodney Lynn)
Journal Title
Journal ISSN
Volume Title
Publisher
Stellenbosch : Stellenbosch University
Abstract
Description
Thesis (M. Sc) -- University of Stellenbosch, 1991.
One copy microfiche.
Full text to be digitised and attached to bibliographic record.
One copy microfiche.
Full text to be digitised and attached to bibliographic record.
Keywords
Microelectronics, Photoresists, Masks (Electronics), Dissertations -- Chemistry