High Q silicon photonic crystal cavities for functional cladding materials

Start Page
450
End Page
451
Article Number
6656631
Citation
2013 IEEE Photonics Conference, IPC 2013. - Piscataway, NJ : IEEE, 2013. - Art.-Nr. 6656631, i.e. Seite 450-451
Contribution to Conference
2013 IEEE Photonics Conference, IPC 2013  
Publisher DOI
10.1109/IPCon.2013.6656631
Scopus ID
2-s2.0-84892731025
Publisher
IEEE
We demonstrate a novel method to define high Q silicon photonic crystal cavities with functional polymer cladding with ultra precision using spatially resolved electron beam bleaching of a chromophore doped polymer. © 2013 IEEE.
DDC Class
600: Technik
620: Ingenieurwissenschaften