HIGH-TEMPERATURE STABILITY OF PLATINUM SILICIDE ASSOCIATED WITH FLUORINE IMPLANTATION

doi:10.1063/1.345327

Title:	HIGH-TEMPERATURE STABILITY OF PLATINUM SILICIDE ASSOCIATED WITH FLUORINE IMPLANTATION
Authors:	TSAI, JY TSUI, BY CHEN, MC 交大名義發表電控工程研究所 National Chiao Tung University Institute of Electrical and Control Engineering
Issue Date:	1-Apr-1990
URI:	http://dx.doi.org/10.1063/1.345327 http://hdl.handle.net/11536/4143
ISSN:	0021-8979
DOI:	10.1063/1.345327
Journal:	JOURNAL OF APPLIED PHYSICS
Volume:	67
Issue:	7
Begin Page:	3530
End Page:	3533
Appears in Collections:	Articles