Nanofabrication of arrays of silicon field emitters with vertical silicon nanowire current limiters and self-aligned gates
Author(s)
Guerrera, Stephen; Akinwande, Akintunde I![Thumbnail](/bitstream/handle/1721.1/110709/Nanofabrication%20of%20arrays.pdf.jpg?sequence=4&isAllowed=y)
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We developed a fabrication process for embedding a dense array (10⁸cm⁻²) of high-aspect-ratio silicon nanowires (200 nm diameter and 10 μm tall) in a dielectric matrix and then structured/exposed the tips of the nanowires to form self-aligned gate field emitter arrays using chemical mechanical polishing (CMP). Using this structure, we demonstrated a high current density (100 A cm⁻²), uniform, and long lifetime (>100 h) silicon field emitter array architecture in which the current emitted by each tip is regulated by the silicon nanowire current limiter connected in series with the tip. Using the current voltage characteristics and with the aid of numerical device models, we estimated the tip radius of our field emission arrays to be ≈4.8 nm, as consistent with the tip radius measured using a scanning electron microscope (SEM).
Date issued
2016-06Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Microsystems Technology LaboratoriesJournal
Nanotechnology
Publisher
IOP Publishing
Citation
Guerrera, S A and Akinwande, A I. “Nanofabrication of Arrays of Silicon Field Emitters with Vertical Silicon Nanowire Current Limiters and Self-Aligned Gates.” Nanotechnology 27, 29 (June 2016): 295302 © 2016 IOP Publishing Ltd
Version: Final published version
ISSN
0957-4484
1361-6528