Integrating optics and micro-fluidic channels using femtosecond laser irradiation
Author(s)
Agarwal, Anuradha Murthy; Hu, J.; Richardson, M.; Richardson, K.; Petit, L.; Carlie, Nathan; Faris, C.; Choi, J.; Ramme, M.; Anderson, T.; Kimerling, Lionel C.; ... Show more Show less
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The ability to integrate micro-channels for fluid transport with optical elements is attractive for the development of compact and portable chip-based sensors. Femtosecond Laser Direct Writing (FLDW) in transparent materials is a powerful tool for the fabrication of such integrated devices. We demonstrate the use of FLDW to fabricate coupled micro-fluidic channels and optical waveguides towards an integrated sensing device for molecular detection. Waveguides were directly written into the host material and channels were formed by modifying the molecular structure through FLDW followed by wet chemical etching. Multiple host materials including chalcogenide glasses for IR detection are discussed.
Date issued
2009-02Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering; Massachusetts Institute of Technology. Microphotonics CenterJournal
Proceedings of SPIE
Publisher
The International Society for Optical Engineering
Citation
Anderson, T. et al. “Integrating optics and micro-fluidic channels using femtosecond laser irradiation.” Commercial and Biomedical Applications of Ultrafast Lasers IX. Ed. Joseph Neev et al. San Jose, CA, USA: SPIE, 2009. 72030I-9. © 2009 SPIE--The International Society for Optical Engineering
Version: Final published version
ISSN
0277-786X