Title:
Development of an integrated organic film removal and surface conditioning process using low molecular weight alcohols for advanced Integrated Circuit (IC) fabrication
Development of an integrated organic film removal and surface conditioning process using low molecular weight alcohols for advanced Integrated Circuit (IC) fabrication
Author(s)
Kamal, Tazrien
Advisor(s)
Ludovice, Peter J.
Editor(s)
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Abstract
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Date Issued
2000-12
Extent
238 bytes
Resource Type
Text
Resource Subtype
Dissertation
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Access restricted to authorized Georgia Tech users only.