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Low temperature assembly method of microfluidic bio-molecules detection device

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Van Loo, Stéphanie [EMMI/Microsys] Stoukatch, Serguei [EMMI/Microsys] Axisa, Fabrice [EMMI/Microsys] Destiné, Jacques [EMMI/Microsys] Van Overstraeten, Nancy [UCL] Flandre, Denis [UCL] Mertens, Pascal [EMMI/Microsys]

We developed a microfluidic device for the detection of bio-molecules. The active part of the device is a biofunctionalized interdigitated capacitive sensor. The microsystem consists of a sensor on silicon chip, a microfluidic channel formed by photo-patternable resist and a plastic cover. We implemented a low temperature packaging process to assemble the sensor and prevent the biological material from degradation.

Document type Communication à un colloque (Conference Paper) – Présentation orale avec comité de sélection
Access type Accès restreint
Publication date 2012
Language Anglais
Conference "3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012)", Tokyo (Japan) (du 22/05/2012 au 23/05/2012)
Peer reviewed yes
Host document "Proceedings of the 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012)"- 181-184 (ISBN : 978-1-4673-0743-7)
Publisher IEEE
Publication status Publié
Affiliation UCL - SST/ICTM/ELEN - Pôle en ingénierie électrique
Keywords Assembly ; Bonding ; Microfluidics ; Silicon ; Temperature sensors ; Wires
Links
Bibliographic reference Van Loo, Stéphanie ; Stoukatch, Serguei ; Axisa, Fabrice ; Destiné, Jacques ; Van Overstraeten, Nancy ; et. al. Low temperature assembly method of microfluidic bio-molecules detection device.3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012) (Tokyo (Japan), du 22/05/2012 au 23/05/2012). In: Proceedings of the 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012), IEEE2012, p.181-184
Permanent URL http://hdl.handle.net/2078.1/114332