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Journal Article | FZJ-2022-02705 |
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2022
Trans Tech Publications Ltd.
Baech
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Please use a persistent id in citations: http://hdl.handle.net/2128/33558 doi:10.4028/p-05sz31
Abstract: The review on bulk growth of SiC includes a basic overview on the widely used physical vapor transport method for processing of 4H-SiC boules as well as the discussion of three current research topics: (a) Sublimation bulk growth of large area, freestanding cubic SiC, (b) in-situ Visualization of the PVT Process using 2D and 3D X-ray based imaging and (c) prediction of dislocation formation and motion in SiC using a continuum model of dislocation dynamics (CDD).
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