A study of amorphization energies in silicon for different implantation parameters
Loading...
Date
Authors
Friedland, Erich Karl Helmuth
Journal Title
Journal ISSN
Volume Title
Publisher
Elsevier
Abstract
Please open article to read abstract
Description
Keywords
Amorphization, Damage profiles
Sustainable Development Goals
Citation
Friedland, E 2007, ‘A study of amorphization energies in silicon for different implantation parameters’, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 256, issue 1, pp. 193-198 [http://www.sciencedirect.com/science/journal/0168583X]