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SBM 공정 기술의 개발과 초소형 각속도계에의 응용 : Development of the SBM(surfacebulk micromachining) technology and its application to the fabrication of micro-gyroscope
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- Authors
- Advisor
- 조동일
- Issue Date
- 2000
- Publisher
- 서울대학교 대학원
- Keywords
- 표면/몸체미세가공 ; surface/bulk micromachining process ; (111) 실리콘 웨이퍼 ; (111) silicon wafer ; 단결정 실리콘 구조물 ; single crystal silicon structure ; 정션 절연 방법 ; p-n junction isolation method ; 산화막/다결정실리콘/금속 절연 방법 ; oxide/polysilicon/metal isolation method
- Description
- 학위논문(박사)--서울대학교 대학원 :전기공학부,2000.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000069165
https://hdl.handle.net/10371/30909
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