Dynamics of sputtered particles in multipulse HiPIMS discharge

AAS; discharge; HiPIMS; LIF; multipulse; sputtering; Discharge; High power; Ionized atom; Magnetron sputtering process; Micropulses; Multipulses; Sputtered particles; Condensed Matter Physics

Abstract :

[en] The behavior of the ground state neutral and singly ionized atoms is studied in multipulse high power impulse magnetron sputtering processes. The time-resolved two-dimensional laser induced fluorescence was used for imaging the discharge volume (density mapping) during the plasma-on and plasma-off time phases. The role of the number of micropulses and delay time between the micropulses in the pulse package is analyzed and discussed systematically. In addition, the propagation of the sputtered particles from the target is investigated.

Disciplines :

Chemistry

Author, co-author :

Hnilica, J. ; Department of Physical Electronics, Masaryk University, Brno, Czech Republic

Klein, P. ; Department of Physical Electronics, Masaryk University, Brno, Czech Republic

Vašina, P. ; Department of Physical Electronics, Masaryk University, Brno, Czech Republic

Snyders, Rony ; Université de Mons - UMONS > Faculté des Science > Service de Chimie des Interactions Plasma-Surface ; Materia Nova Research Center, Mons, Belgium

Britun, NIKOLAY ; Université de Mons - UMONS > Faculté des Science > Service de Chimie des Interactions Plasma-Surface

Language :

English

Title :

Dynamics of sputtered particles in multipulse HiPIMS discharge

Publication date :

April 2023

Journal title :

Plasma Sources Science and Technology

ISSN :

0963-0252

eISSN :

1361-6595

Publisher :

Institute of Physics

Volume :

Issue :

Pages :

045003

Peer reviewed :

Peer Reviewed verified by ORBi

Additional URL :

https://iopscience.iop.org/article/10.1088/1361-6595/acc686

Research unit :

S882 - Chimie des Interactions Plasma-Surface

Research institute :

Matériaux

Funders :

Ministry of Education, Youth and Sports of the Czech Republic

Funding text :

This research was supported by Project LM2023039 funded by the Ministry of Education, Youth and Sports of the Czech Republic. N Britun acknowledges the support of the ‘REFORGAS GreenWin’ project (Grant No. 7267).

Data Set :

10.1088/1361-6595/acc686

Available on ORBi UMONS :

since 11 January 2024

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